Application of electrodeposition utilizing supercritical carbon dioxide into nano-scale Cu wiring toward eco-friendly integrated circuit technology

論文・著書情報

タイトル

和文:
英文:	Application of electrodeposition utilizing supercritical carbon dioxide into nano-scale Cu wiring toward eco-friendly integrated circuit technology

著者

和文:	曽根正人, 樋口和人, Nao Yoshimoto, 清水徹也, 名越貴志, 栗岡智行, Chang Tso-Fu Mark.
英文:	Masato Sone, Kazuhito Higuchi, Nao Yoshimoto, Tetsuya Shimizu, Takashi Nagoshi, Tomoyuki Kurioka, Tso-Fu Mark Chang.

言語

English

掲載誌/書名

和文:
英文:	THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals

巻, 号, ページ

出版年月

2025年10月16日

出版者

和文:
英文:

会議名称

和文:
英文:	THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals

開催地

和文:
英文:	XI'AN