論文

• Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology, Japanese Journal of Applied Physics, Vol. 63, No. 4, p. 04SP23, Feb. 2024.  公式リンク  
  

国際会議発表 (査読有り)

• Kisuke Miyado, Torauto Yamada, Devi Srujana Tenneti, Chihaya Mukaide, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Devi Srujana Tenneti, Kisuke Miyado, Chihaya Mukaide, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.

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