|
飯塚直哉 研究業績一覧 (5件)
- 2024
- 2023
- 2022
- 2021
- 2020
- 全件表示
論文
-
S.R.Mohanty,
T.Sakamoto,
Y.Kobayashi,
Naoya Iizuka,
Nozomu Kishi,
MASATO WATANABE,
Tohru Kawamura,
AKITOSHI OKINO,
KAZUHIKO HORIOKA,
E.Hotta.
Influence of electrode separation and gas curtain on extreme ultraviolet emission of a gas jet z-pinch source,
Applied Physics Letters,
Vol. 89,
No. 4,
pp. 041502-1-3,
July 2006.
国際会議発表 (査読有り)
-
Sakuchi Osamu,
Iizuka Naoya,
Jiang Fei,
Watanabe Masato,
Kawamura Tohru,
Okino Akitoshi,
Horioka Kazuhiko,
Hotta Eiki.
Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography,
The 25th Symposium on Plasma Processing (SPP-25),
Jan. 2008.
-
MASATO WATANABE,
Nozomu Kishi,
Naoya Iizuka,
Shinya Orishimo,
Fei Jiang,
AKITOSHI OKINO,
EIKI HOTTA.
Optical Observation of Gas Jet Z-Pinch Discharge Produced Extreme Ultraviolet Light Source,
16th IEEE International Pulsed Power Conference,
IEEE,
pp. 1679-1682,
Nov. 2007.
公式リンク
国内会議発表 (査読有り)
-
Naoya Iizuka,
Toshiro Sakamoto,
Yasunori Kobayashi,
Inho Song,
Smruti R. Mohanty,
Masato Watanabe,
AKITOSHI OKINO,
Eiki Hotta.
Optimization of a gas jet-type Z-pinch discharge EUV light source,
平成18年度日本分光学会春季講演会・シンポジウム,
日本分光学会,
May 2006.
国内会議発表 (査読なし・不明)
-
岸望,
飯塚直哉,
坂本敏郎,
宋仁皓,
小林靖典,
S.R. Mohanty,
渡辺正人,
沖野晃俊,
堀田栄喜.
同軸二重ノズル型電極を用いたEUV光源の出力特性,
平成18年電気学会基礎・材料・共通部門大会,
平成18年電気学会基礎・材料・共通部門大会(CD-ROM),
pp. 259,
Aug. 2006.
[ BibTeX 形式で保存 ]
[ 論文・著書をCSV形式で保存
]
[ 特許をCSV形式で保存
]
|