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研究業績一覧 (1件)
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論文
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KAZUO TSUTSUI,
Ruifei Xiang,
K. Nagahiro,
T. Shiozawa,
Ahmet Parhat,
Y. Okuno,
M. Matsumoto,
M. Kubota,
Kuniyuki KAKUSHIMA,
HIROSHI IWAI.
Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2,
Microelectronic Engineering,
Vol. 85,
pp. 315-319,
2008.
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