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  論文
    
      
        
M Sumisaka,
K Yamazaki,
Satoshi Fujii,
G Tang,
T Han,
Y Suzuki,
S Otomo,
T Omori,
Ken-Ya Hashimoto.
        
Sputter Deposition of ScAlN Thin Films Using a Sc-Al Alloy Target,
      Japanese Journal of Applied Physics,
      vol. 54,
      pp. 07HD06-1〜04,
      July 2015.
      
        
      
      
       
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