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松田卓也 研究業績一覧 (2件)
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- 2021
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国際会議発表 (査読有り)
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K. Tsutsui,
M. Watanabe,
Y. Nakagawa,
T. Matsuda,
Y. Yoshida,
E. Ikenaga,
K. Kakushima,
P. Ahmet,
H. Nohira,
T. Maruizumi,
A. Ogura,
T. Hattori,
H. Iwai.
New Analysis of Heavily Doped Boron and Arsenic in Shallow Junctions by X-Ray Photoelectron Spectroscopy,
the 38th European Solid-State Device Research Conference (ESSDERC2008),
Sept. 2008.
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H. Nohira,
T. Matsuda,
K. Tachi,
Y. Shiino,
J. Song,
Y. Kuroki,
J. Ng,
P. Ahmet,
K. Kakushima,
K. Tsutsui,
E. Ikenaga,
K. Kobayashi,
H. Iwai,
T. Hattori.
Effect of Deposition Temperature on Thermal Stability of Lanthanum Oxide/Si Interfacial Transition Layer,
2006 Joint International Meeting of ECS,
Oct. 2006.
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