Hibiki Ogiwara Publication List 2022 | Science Tokyo Research Repository (T2R2)

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Patent

Takanori Fukushima, Yoshiaki Shoji, Takashi Kajitani, Hibiki Ogiwara. パターン形成方法、及びプラズマ処理方法. Patent. Published. 国立大学法人東京工業大学, 東京エレクトロン株式会社. 2022/06/27. PCT/JP2022/025607. 2023/01/12. WO 2023/282114. 2023.

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