Journal Paper

• T. Tsushima, H. Chan, Y. Yokoyama, K. Nakamura, K. Masu. Comparison of GHz Signal Transmission Schemes in Si ULSI　- RC line vs. Transmission line -, International Semiconductor Technology Conference (ISTC 2002), No. 115, 2002.
• Y. Yokoyama, T. Fukushige, S. Hata, K. Masu, A. Shimokohbe. On-Chip Variable Inductor Using MEMS Technology, 2002 International Conference on Solid State Devices and Materials, pp. 306-307, 2002.
• M. Yamaguchi, Y. Yokoyama, S. Ikeda, T. Kuribara, K. Masu, K. Arai. Equivalent Circuit Analysis of RF Integrated Inductors with/without Ferromagnetic Material, 2002 International Conference on Solid State Devices and Materials, pp. 650-651, 2002.
• K. Masu, M. Sakamoto, J. I. Lee, K. Furuta, M. Hatanaka, M. Ishikawa, Y. Takahashi, Y. Furumura. Al-CVD Technology using MPA [methylpyrrolidine alane], Advanced Metallization Conference 2002: 12th Asian Session, pp. 52-53, 2002.
• H. Nakashima, N. Takagi, K. Masu. Extraction of Interconnect-Length-Distribution Parameters from CAD Data, Advanced Metallization Conference 2002: 12th Asian Session, 2002.
• H. Shinoki, H. Ito, Y. Yokoyama, K. Masu. Transmission Line Interconnect Structure in Si ULSI, Advanced Metallization Conference 2002: 12th Asian Session, pp. 297-302, 2002.
• Kazuya Masu. Fabrication and Evaluation of On-Chip Micro Variable Inductor, Micro and Nanoengineering International Conference, pp. 210-211, 2002.

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