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細谷宗太郎 2022年 研究業績一覧 (2件 / 5件)
国際会議発表 (査読有り)
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Yuya Yamashita,
Kenta Doi,
Tetsuji Kiyota,
Sotaro Hosoya,
Atsushi Nezu,
Hiroshi Akatsuka.
Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall,
43rd International Symposium on Dry Process (DPS2022),
Proc. 43rd International Symposium on Dry Process (DPS2022),
Program Committee of 43rd International Symposium on Dry Process (DPS2022),
pp. 47-48,
Nov. 2022.
公式リンク
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Yuya YAMASHITA,
Kenta DOI,
Tetsuji KIYOTA,
Akira KOBAYASHI,
Sotaro HOSOYA,
Kazuma YONEDA,
Atsushi NEZU,
Hiroshi AKATSUKA.
Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model,
2022 Gaseous Electronics Conference (GEC 2022)/ 11th International Conference on Reactive Plasmas (ICRP-11),
Proc. ICRP-11/GEC2022,
ICRP-11 / GEC-2022,
pp. 141-142,
Oct. 2022.
公式リンク
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