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2015年 研究業績一覧 (2件 / 19件)
国際会議発表 (査読有り)
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Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
AMC2015, Advanced Metallization Conference,
AMC2015,
Sept. 2015.
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
pp. Wed-C-p81,
Sept. 2015.
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