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2018年 研究業績一覧 (2件 / 19件)
国際会議発表 (査読有り)
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Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Masato Sone,
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu.
EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER,
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
Sept. 2018.
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