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石塚陽大 2019年 研究業績一覧 (1件 / 3件)
著書
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Tso-Fu Mark Chang,
Chun-Yi Chen,
Yota Ishizuka,
Minami Teranishi,
Takuma Suzuki,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors,
Advances in Microelectronics Reviews,
IFSA Publishing,
Vol. 2,
pp. 23-48,
Feb. 2019.
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