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南方浩志 研究業績一覧 (3件)
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論文
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Tatsuya Yamazaki,
Hiroshi Minakata,
Takashi Ito.
Continuous Growth of Low-Temperature Si Epitaxial Layer with Heavily Phosphorous and Boron Doping Using Photoepitaxy,
Journal of The Electrochemical Society,
The Electrochemical Society,
Vol. 137,
No. 6,
pp. 1981-1987,
June 1990.
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Tatsuya Yamazaki,
Hiroshi Minakata,
Takashi Ito.
Continuous Growth of Heavily Doped p+-n+ Si Epitaxial Layer Using Low-Temperature Photoepitaxy,
Applied Physics Letters,
American Institute of Physics,
Vol. 55,
No. 9,
pp. 879-881,
Aug. 1989.
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