Electron temperature diagnosis of CF4/O2 plasma  based on fluorine atomic corona model  by tomographic optical emission spectroscopic measurement

Publication Information

Title

Japanese:
English:	Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement

Author

Japanese:	山下雄也, 土居謙太, 清田哲司, 渡邊修平, 島谷和希, 菊地航行, 叶宇晨, 根津篤, 赤塚洋.
English:	Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Shuhei Watanabe, Kazuki Shimatani, Wataru Kikuchi, Yuchen Ye, Atsushi Nezu, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of ESCAMPIG2024

Volume, Number, Page

Published date

July 9, 2024

Publisher

Japanese:
English:	Department of Plasma Physics and Technology of Masaryk University (MUNI)

Conference name

Japanese:
English:	ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases) 2024

Conference site

Japanese:	ブルノ
English:	Brno

Official URL