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Publication List - Kazuki Shimatani (2 / 16 entries)
Domestic Conference (Reviewed)
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Yuchen Ye,
Kenta Doi,
Tetsuji Kiyota,
Wataru Kikuchi,
Wentao He,
Kazuki Shimatani,
Hinata Hanyu,
Yuya Yamashita,
Atsushi Nezu,
Hiroshi Akatsuka.
Comparison of Analytical and Non-parametric Inversion Approaches for EEPFs in Ar ICP based on OES and CRM,
The 73rd JSAP Spring Meeting 2026,
Extended Abstracts of the 73rd JSAP Spring Meeting 2026,
Japan Scociety of Applied Physics,
p. 08-081,
Mar. 2026.
Official location
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Kazuki Shimatani,
Tetsuji Kiyota,
Kenta Doi,
Yuya Yamashita,
Wataru Kikuchi,
Kenta Ishi,
Jun Enomoto,
Yuchen Ye,
Atsushi Nezu,
Hiroshi Akatsuka.
Spatial Distribution Diagnosis of Electron Temperature and Density in Inductively Coupled Nitrogen-Argon Plasma by Tomographic OES: Validation with High-Resolution Single-Channel Spectroscopy and Langmuir Probe Measurement,
The 43rd Symposium on Plasma Processing (SPP43),
Proceedings of 43rd Symposium on Plasma Processing (SPP-43),
JSAP Div. Plasma Electronics,
pp. 61-62,
Jan. 2026.
Official location
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