International Conference (Reviewed)

• Yuchen Ye, Kenta Doi, Tetsuji Kiyota, Kazuki Shimatani, Hinata Hanyu, Ayaki Sakurai, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka. Effects of Bias Power on EEPFs near the Substrate in Argon ICP Measured by a Langmuir Probe, The 46th International Symposium on Dry Process (DPS2025), Proc. DPS2025, Division of Plasma Electronics, Japan Society of Applied Physics, Nov. 2025.  Official location  

International Conference (Not reviewed / Unknown)

• Yuchen Ye, Kenta Doi, Tetsuji Kiyota, Wataru Kikuchi, Kazuki Shimatani, Hinata Hanyu, Wentao He, Ayaki Sakurai, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka. Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects, The 78th Annual Gaseous Electronics Conference (GEC2025), Bull. American Phys. Soc., Americal Physical Society, Oct. 2025.  Official location  

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