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Title
Japanese:トモグラフィック発光分光法による誘導結合窒素・アルゴンプラズマの電子温度・密度空間分布計測および高分解能シングルチャネル分光とラングミュアプローブによる検証 
English:Spatial Distribution Diagnosis of Electron Temperature and Density in Inductively Coupled Nitrogen-Argon Plasma by Tomographic OES: Validation with High-Resolution Single-Channel Spectroscopy and Langmuir Probe Measurement 
Author
Japanese: 島谷和希, 清田哲司, 土居謙太, 山下雄也, 菊地航行, 石健太, 榎本純, 叶宇晨, 根津篤, 赤塚洋.  
English: Kazuki Shimatani, Tetsuji Kiyota, Kenta Doi, Yuya Yamashita, Wataru Kikuchi, Kenta Ishi, Jun Enomoto, Yuchen Ye, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第43回 プラズマプロセシング研究会 プロシーディングス 
English:Proceedings of 43rd Symposium on Plasma Processing (SPP-43) 
Volume, Number, Page         pp. 61-62
Published date Jan. 15, 2026 
Publisher
Japanese:公益社団法人 応用物理学会 プラズマエレクトロニクス分科会 
English:JSAP Div. Plasma Electronics 
Conference name
Japanese:第43回プラズマプロセシング研究会 
English:The 43rd Symposium on Plasma Processing (SPP43) 
Conference site
Japanese:大阪 
English:Osaka 
Official URL https://gakkai-gran.jp/spp43/
 
Abstract This study investigates the spatial distribution of electron temperature (Te) and electron density (ne) in inductively coupled nitrogen-argon plasma using tomographic optical emission spectroscopy (OES) and a numerical chemical-kinetic model. Although diagnosing nitrogen plasma via OES is complex due to various excited states, this method successfully visualized the 2-D profiles of plasma parameters. According to the results of tomographic OES, Te increases with RF power, while ne decreases. The diagnostic characteristics were examined by comparing the results with high-resolution single-channel OES and Langmuir probe measurements.

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