Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information

Publication Information

Title

Japanese:	Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information
English:	Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information

Author

Japanese:	Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone, Katsuyuki Machida.
English:	Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2025

Publisher

Japanese:
English:

Conference name

Japanese:	International Microprocesses and Nanotechnology Conference (MNC 2025)
English:	International Microprocesses and Nanotechnology Conference (MNC 2025)

Conference site

Japanese:
English:	Tokyo