Miniaturization of Highly Sensitive Single-Axis Gold Proof-mass MEMS Accelerometer for Wearable Device

論文・著書情報

タイトル

和文:	Miniaturization of Highly Sensitive Single-Axis Gold Proof-mass MEMS Accelerometer for Wearable Device
英文:	Miniaturization of Highly Sensitive Single-Axis Gold Proof-mass MEMS Accelerometer for Wearable Device

著者

和文:	Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito.
英文:	Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito.

言語

English

掲載誌/書名

和文:
英文:

巻, 号, ページ

出版年月

2026年9月

出版者

和文:
英文:

会議名称

和文:	2026 International Conference on Solid State Devices and Materials (SSDM2026)
英文:	2026 International Conference on Solid State Devices and Materials (SSDM2026)

開催地

和文:
英文: