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Publication List - Hirofumi Niijima (7 entries)
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International Conference (Reviewed)
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Hirofumi Niijima,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes,
The 30th International Microprocesses and Nanotechnology Conference,
Nov. 2017.
Domestic Conference (Reviewed)
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Takasi Itikawa,
Hirofumi Niijima,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
3軸Au錘MEMS加速度センサにおける検出電極構造の検討,
令和元年電気学会センサ・マイクロマシン部門総合研究会,
pp. 67-72,
July 2019.
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Takasi Itikawa,
Hirofumi Niijima,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
3軸Au錘MEMS加速度センサにおける平行平板型電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
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Takasi Itikawa,
Hirofumi Niijima,
Sayaka Koga,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Au単一錘平行平板型3軸MEMS加速度センサの検討,
第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会),
Oct. 2018.
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Hirofumi Niijima,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2),
第34回「センサ・マイクロマシンと応用システム」シンポジウム,
01am2-PLN-8,
Oct. 2017.
Official location
Domestic Conference (Not reviewed / Unknown)
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Hirofumi Niijima,
Shouta Otobe,
Motohiro Takayasu,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu.
高感度MEMS加速度センサのBrownian Noise評価に関する検討,
第64回応用物理学会春季学術講演会,
Mar. 2018.
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Hirofumi Niijima,
Shouta Otobe,
Motohiro Takayasu,
Daisuke Yamane,
Hiroyuki Ito,
Teruaki Safu,
Toshifumi Konishi,
Shiro Dosho,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass,
平成30年電気学会全国大会,
Mar. 2018.
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