国際会議発表 (査読有り)

• Masato Sone, Kazuhito Higuchi, Nao Yoshimoto, Tetsuya Shimizu, Takashi Nagoshi, Tomoyuki Kurioka, Tso-Fu Mark Chang. Application of electrodeposition utilizing supercritical carbon dioxide into nano-scale Cu wiring toward eco-friendly integrated circuit technology, THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals, THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals, Oct. 2025.
• Masato Sone, Tso-Fu Mark Chang, Tetsuya Shimizu, Nao Shinoda. Nanoscale Wiring by Cu Electrodeposition in Supercritical CO2 Emulsified Electrolyte with Continuous-Flow Reaction System (Invited Lecture), Separation Techniques 2016,2nd International Conference and Expo on Separation Techniques, Separation Techniques 2016, Sept. 2016.
• Masato Sone, Tso-Fu Mark Chang, Tetsuya Shimizu, Nao Shinoda. Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits (Invited Lecture), 216 Collaborative Conference on 3D and Materials Research (CC3DMR), CC3DMR, June 2016.
• Hikaru Kinashi, Tetsuya Shimizu, Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte, TACT2013, International Thin Films Conference, TACT2013, Oct. 2013.

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