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中山誠 研究業績一覧 (3件)
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論文
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Shiro Hino,
Makoto Nakayama,
Kenji Takahashi,
Hiroshi Funakubo,
Eisuke Tokumitsu.
Characterization of Hafnium Oxide Thin Films by Sorce Gas Pulse Introduced Metalorganic Chemical Vapor Deposition using Amino-Family Hf Precursors,
Jpn. J. Appl. Phys.,
Vol. 42, Part 1,
No. 9B,
pp. 6015-6018,
Sept. 2003.
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Kenji Takahashi,
Makoto Nakayama,
Shiro Hino,
Eisuke Tokumitsu,
Hiroshi Funakubo.
Growth of Hafnium Oxide Films by Metalorganic Chemical Vapor Deposition Using Oxygen-Free Hf[N(C2H5)2]4 Precursor and Their Properties,
Integrated Ferroelectrics,
vol. 57,
pp. 1185-1192,
Mar. 2003.
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Kenji Takahashi,
Makoto Nakayama,
Shintaro Yokoyama,
Takeshi Kimura,
Eisuke Tokumitsu.
Preparation of hafnium oxide films from oxygen-free Hf[N(C2H5)2]4 precursor and their properties,
Applied Surface Science,
No. 216,
pp. 296-301,
Jan. 2003.
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