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研究業績一覧 (4件)
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論文
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KAZUO TSUTSUI,
T Matsuda,
M Watanabe,
Cheng-Guo Jin,
佐々木雄一朗,
Bunji Mizuno,
E Ikenaga,
Kuniyuki KAKUSHIMA,
Ahmet Parhat,
T Maruizumi,
Hiroshi Nohira,
takeo hattori,
HIROSHI IWAI.
Activated Boron and its Concentration Profiles in Heavily Doped Si Studied by Soft X-ray Photoelectron Spectroscopy and Hall Measurements,
Journal of Applied Physics,
Vol. 104,
093709,
2008.
国際会議発表 (査読有り)
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B. Mizuno,
Y. Sasaki,
C. G. Jin,
K. Okashita,
K. Nakamoto,
T. Kitaoka,
K. Tsutsui,
H. A. Sauddin,
H. Iwai.
Production-worthy approach of Plasma Doping (PD),
The 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT 2008),
Oct. 2008.
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Kazuo Tsutsui,
Masamitsu Watanabe,
Yasumasa Nakagawa,
Kazunori Sakai,
Takayuki Kai,
Cheng-Guo Jin,
Yuichiro Sasaki,
Kuniyuki Kakushima,
Parhat Ahmet,
Bunji Mizuno,
Takeo Hattori,
Hiroshi Iwai..
Profiling of Carrier Properties for Shallow Junctions Using a New Sub-nanometer Step-by-step Etching Technique,
The 8th International Workshop on Junction Technology (IWJT2008),
May 2008.
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Y. Sasaki,
H. Ito,
K. Okashita,
H. Tamura,
C. G. Jin,
B. Mizuno,
T. Okumura,
I. Aiba,
Y. Fukagawa,
H. Sauddin,
K. Tsutsui,
H. Iwai.
Production-worthy USJ formation by self-regulatory plasma doping method,
IIT2006,
2006.
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