|
寺西美波 2015年 研究業績一覧 (7件 / 21件)
国際会議発表 (査読有り)
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
pp. 52-53,
Sept. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
AMC2015, Advanced Metallization Conference,
AMC2015,
Sept. 2015.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
pp. Wed-C-p81,
Sept. 2015.
-
Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
25th Advanced Metallization Conference Asian Session (ADMETAplus2015),
Sept. 2015.
-
Minami Teranishi,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Masaki Yano,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu,
Tatsuo Sato,
Masato Sone.
Stability of Movable Structure Formed by Au Electroplating for MEMS Devices,
ICMAT2015 & IUMRS-ICA2015,,
ICMAT2015 & IUMRS-ICA2015,,
June 2015.
国内会議発表 (査読なし・不明)
-
寺西美波,
Tso-Fu Mark Chang,
小西敏文,
松島隆明,
町田克之,
年吉 洋,
山根大輔,
伊藤浩之,
益 一哉,
曽根正人.
電解金めっきで作製したMEMSデバイスにおける動作構造安定性,
応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ,
p. 7,
July 2015.
-
寺西美波,
Chang Tso-Fu Mark,
山根大輔,
小西敏文,
松島隆明,
伊藤浩之,
年吉 洋,
町田克之,
益 一哉,
曽根正人.
電解金めっきで作製した微小カンチレバーの形状安定性評価,
平成27年電気学会センサ・マイクロマシン部門総合研究会,
pp. 15-18,
July 2015.
公式リンク
[ BibTeX 形式で保存 ]
[ 論文・著書をCSV形式で保存
]
[ 特許をCSV形式で保存
]
|