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TENNETIDEVI 研究業績一覧 (13件)
論文
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Kisuke Miyado,
Devi Srujana Tenneti,
Akira Onishi,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology,
Japanese Journal of Applied Physics,
Vol. 63,
No. 4,
p. 04SP23,
Feb. 2024.
公式リンク
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Akira Onishi,
Kisuke Miyado,
Devi Srujana Tenneti,
Katsuyuki Machida,
Parthojit Chakraborty,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology,
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Mar. 2023.
公式リンク
国際会議発表 (査読有り)
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Shunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Tenneti Devi Srujana,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
Oct. 2024.
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Devi Srujana Tenneti,
Kisuke Miyado,
Chihaya Mukaide,
Torauto Yamada,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Kisuke Miyado,
Torauto Yamada,
Devi Srujana Tenneti,
Chihaya Mukaide,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Syunkai Watanabe,
Shunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Tenneti Devi Srujana,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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御宿 希祐Kisuke Miyado,
Devi.Srujana Tenneti,
Akira Onishi,
Katsuyuki Machida,
Tomoyuki Kurioka,
Parthojit CHAKRABORTY,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer,
2023 International Conference on Solid State Devices and Materials,
Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02,
Sept. 2023.
公式リンク
国内会議発表 (査読有り)
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御宿 希祐,
大西 哲 Tenneti Devi Srujana 町田克之,
TENNETI DEVI,
町田 克之,
栗岡 智行,
Tso-Fu Mark Chang,
曽根正人,
三宅美博,
伊藤浩之.
Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討,
第15回集積化MEMSシンポジウム,
第15回集積化MEMSシンポジウム論文集,
応用物理学会集積化MEMS技術研究会,
Vol. 8A2-D-4,
Oct. 2023.
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御宿 希祐,
大西 哲,
Devi Srujana Tenneti,
町田 克之,
栗岡智行,
CHAKRABORTYP,
Tso-Fu Mark Chang,
曽根正人,
三宅美博,
伊藤浩之.
Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討,
第84回応用物理学会秋季学術講演会,
第84回応用物理学会秋季学術講演会 講演予稿集,
Vol. 20p-B201-1,
Sept. 2023.
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御宿 希祐,
Tenneti Devi Srujana,
町田 克之,
栗岡 智行,
Tso-Fu Mark Chang,
曽根 正人,
三宅 美博,
伊藤 浩之.
1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討,
第14回集積化MEMS技術研究ワークショップ,
p04,
Aug. 2023.
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御宿 希祐,
大西哲,
TENNETIDEVI,
町田克之,
CHAKRABORTYP,
曽根正人,
三宅美博,
伊藤浩之.
Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討,
第70回応用物理学会春季学術講演会,
第70回応用物理学会春季学術講演会,
16a-B410-6,
Mar. 2023.
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御宿 希祐,
大西哲,
TENNETIDEVI,
CHAKRABORTYP,
町田克之,
飯田慎一,
小西敏文,
曽根正人,
三宅美博,
伊藤浩之.
エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討,
第83回応用物理学会秋季学術講演会,
第83回応用物理学会秋季学術講演会,
22a-A406-2,
Sept. 2022.
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御宿 希祐,
大西哲,
TENNETIDEVI,
CHAKRABORTYP,
町田克之,
飯田慎一,
小西敏文,
曽根正人,
三宅美博,
伊藤浩之.
Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討,
第13回集積化MEMS技術研究ワークショップ,
Aug. 2022.
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