論文

• Xun Gu, Takenao Nemoto, Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi. Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon, J. Electrochem. Soc., J. Electrochem. Soc., Vol. 156, No. 6, pp. H409-H415, June 2009.
• Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda, Yasuyuki Shirai, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, Takayuki Watanabe, Takashi Ito. Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system, J. Vac. Sci. Technol. A, J. Vac. Sci. Technol. A, Vol. A27, No. 3, pp. 465-470, Mar. 2009.
• Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda, Yasuyuki Shirai, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, Takayuki Watanabe, Takashi Ito. High-Efficiency PFC Abatement System Utilizing High-Efficiency PFC Abatement System Utilizing Immobilization, IEEE Trans. on Semicon. Manufacturing, IEEE, Vol. 21, No. 4, pp. 668-675, Nov. 2008.
• Tadahiro Ohmi, Hiraku ISHIKAWA, Toshihisa NOZAWA, Takaaki MATSUOKA, Akinobu TERAMOTO, Masaki HIRAYAMA, Takashi ITO, Tadahiro OHMI. Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization, Japanese Journal of Applied Physics, The Japan Society of Applied Physics, Vol. 47, No. 4, pp. 2531–2534, Apr. 2008.
• Takenao Nemoto, Hiroshi Imai, Akinobu Teramoto, Takashi Ito, Shigetoshi Sugawa, Tadahiro Ohmi. Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections, Journal of The Electrochemical Society, The Electrochemical Society, Vol. 155, No. 5, pp. H323-H328, Mar. 2008.

国際会議発表 (査読有り)

• Shunnya Yamamoto, Anna Gubarevich, Katsumi Yoshida, Tetsuya Goto, Akinobu Teramoto. Plasma irradiation behavior of Y-Al-O ceramics, 42nd International Symposium on Dry Process (DPS2021), Nov. 2021.

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