Journal Paper

• Atsuo Katagiri, Mutsuo Uehara, Mao Kurokawa, Kensuke Akiyama, Takao Shimizu, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo. Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering, Journal of ELECTRONIC MATERIALS, vol. 49, no. 12, pp. 7509-7517, Oct. 2020.
• Mutsuo Uehara, Atsuo Katagiri, Mao Kurokawa, Kensuke Akiyama, Takao Shimizu, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo. Preparation of CaMgSi and Ca7Mg7.25Si14 single phase films and their thermoelectric properties, MRS Adv., Vol. 4, No. 25-26, pp. 1503-1508, Feb. 2019.
• Atsuo Katagiri, Shota Ogawa, Mutsuo Uehara, P. S. Sankara Rama Krishnan, Mao Kurokawa, Masaaki Matsushima, Takao Shimizu, Kensuke Akiyama, Hiroshi Funakubo. Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties, J. Mater. Sic., vol. 53, no. 7, pp. 5151-5158, Apr. 2018.
• Mao Kurokawa, Takao Shimizu, Mutsuo Uehara, Atsuo Katagiri, Kensuke Akiyama, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo. Control of p- and n-type Conduction in Thermoelectric Non-doped Mg2Si Thin Films Prepared by Sputtering Method, MRS Advances, vol. 3, no. 24, pp. 1355-1359, Feb. 2018.
• Tomoya Sato, Daichi Ichinose, Takaaki Inoue, Mutsuo Uehara, Kiriha Katayama, Hiroshi Funakubo, Kiyoshi Uchiyama. Evaluation of Chemical Stability in Perovskite-Type Proton-Conductive Oxide Thin-Films, Science of Advanced Materials, vol. 10, pp. 8-11, Jan. 2018.
• Mutsuo Uehara, Kensuke Akiyama, Takao Shimizu, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo. Preparation of Ca–Si Films on (001) Al2O3 Substrates by an RF Magnetron Sputtering Method and Their Electrical Properties, Journal of Electronic Materials, Vol. 45, No. 6, pp. 3121-3126, Mar. 2016.

International Conference (Reviewed)

• Mao Kurokawa, Mutsuo Uehara, Daichi Ichinose, Takao Shimizu, Kensuke Akiyama, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Atsuo Katagiri, Hiroshi Funakubo. Control of P-Type and N-Type Conduction in Thermoelectric Mg2Si Thin Films Prepared by Sputtering Method, 2017 MRS Fall Meeting, Nov. 2017.

International Conference (Not reviewed / Unknown)

• A. Katagiri, M. Uehara, T. Shimizu, M. Matsushima, K. Akiyama, H. Uchida, Y. Kimura, H. Funakubo. Preparation of Mg2Si-based thin films and these properties, APAC-SILICIDE 2019 (The Fifth Asia-Pacific Conference on Semiconducting Silicides and Related Materials), July 2019.
• Hiroshi Funakubo, Mutsuo Uehara, Mao Kurokawa, Atsuo Katagiri, Kensuke Akiyama, Takao Shimizu, Masaaki Matsusima, Hiroshi Uchida, Yoshisato Kimura. Composition Dependency of Thermoelectric Properties in Ca-Mg-Si System Using Thin Films Prepared by RF Magnetron Sputtering Method, 2018 MRS Fall Meeting, Nov. 2018.
• Hiroshi Funakubo, Mutsuo Uehara, Mao Kurokawa, Atsuo Katagiri, Kensuke Akiyama, Takao Shimizu, Masaaki Matsusima, Hiroshi Uchida, Yoshisato Kimura. Growth of Mg-Ca-Si thick flms by RF sputtering method and their thermoelectric property, ICT 2018 (2018 International and European Conference on Thermoelectrics), July 2018.
• M. Uehara, M. Kurokawa, K. Akiyama, T. Shimizu, M. Matsushima, H. Uchida, Y. Kimura, H. Funakubo. Thermoelectric characterization of sputtered Ca-Mg-Si films, EMA 2016, Jan. 2016.
• M. Uehara, K. Akiyama, M. Matsushima, T. Shimizu, H. Uchida, Y. Kimura, H. Funakubo. Phase Identification of Ca-Si Films prepared on (001) Al2O3 Substrates Using X-ray Diffraction Wide Area Reciprocal Space Mapping Method, July 2015.

Domestic Conference (Not reviewed / Unknown)

• Atsuo Katagiri, Mutsuo Uehara, Mao Kurokawa, Kensuke Akiyama, masaaki matsushima, Hiroshi Uchida, YOSHISATO KIMURA, HIROSHI FUNAKUBO. Ca- Mg-Si三元系熱電材料におけるSi含有量変化に伴う導電型の制御, 第81回応用物理学会秋季学術講演会, Sept. 2020.
• Mao Kurokawa, Mutsuo Uehara, Daichi Ichinose, Takao Shimizu, Kensuke Akiyama, masaaki matsushima, Hiroshi Uchida, HIROSHI FUNAKUBO. Mg2Si薄膜の熱電特性に及ぼす歪みの影響, 第63回応用物理学会春季学術講演会, Mar. 2016.
• Mao Kurokawa, Mutsuo Uehara, Kensuke Akiyama, masaaki matsushima, Hiroshi Uchida, YOSHISATO KIMURA, HIROSHI FUNAKUBO. Mg2Si 薄膜の熱電特性に及ぼす種々の因子の影響, 第54回セラミックス基礎科学討論会, Jan. 2016.
• Mutsuo Uehara, Mao Kurokawa, Kensuke Akiyama, Takao Shimizu, masaaki matsushima, Hiroshi Uchida, YOSHISATO KIMURA, HIROSHI FUNAKUBO. スパッタリング法によるCa-Mg-Si 基膜熱電材料の特性評価, 第54回セラミックス基礎科学討論会, Jan. 2016.
• Mutsuo Uehara, Mao Kurokawa, Kensuke Akiyama, masaaki matsushima, Hiroshi Uchida, YOSHISATO KIMURA, HIROSHI FUNAKUBO. スパッタリング法によるCa-Mg-Si基膜の作製と特性評価, 第76回応用物理学会秋季学術講演会, Sept. 2015.

Patent

• HIROSHI FUNAKUBO, Mutsuo Uehara. 合金膜. Patent. Published. 国立大学法人東京工業大学, 東ソー株式会社. 2015/08/28. 特願2015-169146. 2017/03/02. 特開2017-043821. 2017.

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