Journal Paper

• Mina Sato, Mie Tohnishi, Akihiro Matsutani. Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma, Sensors and Materials, Vol. 36, No. 4, pp. 1319-1328, Apr. 2024.

International Conference (Reviewed)

• Mina Sato, Mie Tohnishi, Miho Fujimoto, Akihiro Matsutani. Submicrometer-sized Patterning of Photoresist by Electron Beam Projection Lithography Using Tabletop Scanning Electron Microscope System and Si Stencil Mask, MNC2024 (37th International Microprocesses and Nanotechnology Conference), 14P-1-6, Nov. 2024.
• Kazuki Shishikura, Hiroyuki Nabae, Akihiro Matsutani, Mina Sato, Koichi Suzumori. Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering, The 2024 16th IEEE/SICE International Symposium on System Integration, Proceedings of the 2024 IEEE/SICE International Symposium on System Integration, IEEE, Jan. 2024.  Official location  

Domestic Conference (Not reviewed / Unknown)

• Mina Sato, Mie Tohnishi, Akihiro Matsutani. イオンビーム照射によりアモルファス化したSi表面のXRR測定, 第71回応用物理学会春季学術講演会, Mar. 2024.

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