|
Publication List - Shinya Imai (11 entries)
Journal Paper
-
Ryo Ono,
Shinya Imai,
Yuta Kusama,
Takuya Hamada,
Masaya Hamada,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Emi Kano,
Nobuyuki Ikarashi,
Hitoshi Wakabayash.
Elucidation of PVD MoS2 Film Formation Process and its Structure Focusing on Sub-Monolayer Region,
Japanese Journal of Applied Physics (JJAP),
Vol. 61,
Feb. 2022.
-
Shinya Imai,
Takuya Hamada,
Masaya Hamada,
Takanori Shirokura,
Iriya Muneta,
Kuniyuki Kakushima,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Kazuo Tsutsui,
Hitoshi Wakabayashi.
Importance of Crystallinity Improvement in MoS2 film just after MoS2-Compound Sputtering even followed by Post Sulfurization for Chip-Size Fabrication,
Japanese Journal of Applied Physics (JJAP) (SSDM特集号),
Vol. 60,
Page SBBH10,
Feb. 2021.
International Conference (Reviewed)
-
Shinya Imai,
Ryo Ono,
Iriya Muneta,
Kuniyuki Kakushima,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Kazuo Tsutsui,
Hitoshi Wakabayashi.
Grain-Size Enlargement of MoS2 Film by Low-Rate Sputtering with Molybdenum Grid,
IEEE Electron Devices Technology and Manufacturing Conference (EDTM),
Mar. 2023.
Official location
-
Ryo Ono,
Shinya Imai,
Takamasa Kawanago,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Hitoshi Wakabayashi.
Improvement of MoS2 Film Quality by Solid-Phase Crystallization from PVD Amorphous MoSx Film,
IEEE Electron Devices Technology and Manufacturing Conference (EDTM),
Mar. 2023.
Official location
-
Ryo Ono,
Shinya Imai,
Yuta Kusama,
Takuya Hamada,
Masaya Hamada,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Nobuyuki Ikarashi,
Hitoshi Wakabayashi.
Growth Mechanism of PVD MoS2 Film from Sub-Monolayer Region,
International Conference on Solid State Devices and Materials,
Sept. 2021.
-
Shinya Imai,
Takuya Hamada,
Masaya Hamada,
Takanori Shirokura,
Shigetaka Tomiya,
Iriya Muneta,
Kuniyuki Kakushima,
Tetsuya Tatsumi,
Kazuo Tsutsui,
Hitoshi Wakabayashi.
Importance of MoS2-Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication,
International Conference of Solid State Devices and Materials (SSDM) 2020,
Sept. 2020.
Domestic Conference (Not reviewed / Unknown)
-
Kaede Teraoka,
Shinya Imai,
Keita Kurohara,
Soma Ito,
Takamasa Kawanago,
Iriya Muneta,
Kuniyuki KAKUSHIMA,
Hitoshi Wakabayashi.
Ni/Al2O3/スパッタWS2コンタクトの電流電圧特性,
84th JSAP Autumn meeting,
Sept. 2023.
-
Shinya Imai,
Ryosuke Kajikawa,
Takamasa Kawanago,
Iriya Muneta,
Kuniyuki KAKUSHIMA,
Tetsuya Tatsumi,
Shigetaka Tomiya,
KAZUO TSUTSUI,
Hitoshi Wakabayashi.
スパッタMoS2膜に対するエッジ金属コンタクトの電流電圧特性,
84th JSAP Autumn meeting,
Sept. 2023.
-
Shinya Imai,
Riyo Ono,
Iriya Muneta,
Kuniyuki KAKUSHIMA,
Tetsuya Tatsumi,
Shigetaka Tomiya,
KAZUO TSUTSUI,
Hitoshi Wakabayashi.
MoS2膜質のスパッタ成膜レート依存性調査,
83th JSAP Autumn meeting,
Sept. 2022.
-
Riyo Ono,
Shinya Imai,
Iriya Muneta,
Kuniyuki KAKUSHIMA,
KAZUO TSUTSUI,
Hitoshi Wakabayashi.
微結晶MoS2膜への硫黄雰囲気アニールによる結晶性向上,
83th JSAP Autumn meeting,
Sept. 2022.
-
Shinya Imai,
Masaya Hamada,
Satoshi Igarashi,
Iriya Muneta,
Kuniyuki KAKUSHIMA,
KAZUO TSUTSUI,
Hitoshi Wakabayashi.
硫化プロセスにおけるスパッタMoS2膜質向上の重要性,
第80回応用物理学会秋季学術講演会,
Sept. 2019.
[ Save as BibTeX ]
[ Paper, Presentations, Books, Others, Degrees: Save as CSV
]
[ Patents: Save as CSV
]
|