国際会議発表 (査読有り)

• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Gen Hikosaka, Chun-Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications, The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken), Sept. 2026.
• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Chang Tso-Fu Mark, Chen Chun-Yi, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer, APCOT 2026, APCOT 2026, June 2026.
• Torauto Yamada, Chihaya Mukaide, Hisashi Takahata, Tomoyuki Kurioka, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito. A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures, IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems, IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems, May 2026.

国内会議発表 (査読有り)

• 高畑 寿志, 栗岡 智行, 山田 虎人, 向出 千隼, 町田 克之, Chen Chun-Yi, Chang Tso-Fu Mark, 三宅 美博, 伊藤 浩之, 曽根 正人. Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.

[ BibTeX 形式で保存 ]    [ 論文・著書をCSV形式で保存 ]    [ 特許をCSV形式で保存 ]