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内藤卓人 研究業績一覧 (3件)
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論文
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Ogawa, H.,
Nakanowatari, A.,
Kitagawa, K.,
Sugiyama, M.,
Naito, T..
Simultaneous measurement of film thickness and surface profile of film-covered objects by monochromatic light interferometry.,
Transacitons of the Society of Instrument and Control Engineers,
vol. 45,
no. 2,
pp. 73-82,
2009.
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Naito, T.,
Sugiyama, M.,
Ogawa, H.,
Kitagawa, K.,
Suzuki, K..
Single-shot interferometry of film-covered objects.,
Journal of the Japan Society Precision Engineering,
vol. 75,
no. 11,
pp. 1315-1322,
2009.
国内会議発表 (査読なし・不明)
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