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Publication List - Minami Teranishi 2016 (5 / 21 entries)
Journal Paper
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers,
Microelectronics Engineering,
Vol. 153,
pp. 90-93,
Apr. 2016.
International Conference (Reviewed)
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hideaki Nakajima,
Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu.
Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices,
29th International Microprocesses and Nanotechnology Conference (MNC 2016),
pp. 10D-5-1,
Nov. 2016.
Official location
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating,
ISE - Topical Meeting,
ISE - Topical Meeting,
Apr. 2016.
Domestic Conference (Reviewed)
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Minami Teranishi,
Mark Chang,
Chun Yi Chen,
Daisuke Yamane,
Kazuya Masu,
Masato Sone,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi.
電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
第33回「センサ・マイクロマシンと応用システム」シンポジウム,
Oct. 2016.
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
電解金めっきで作製したTi/Au微小カンチレバーの構造安定性,
第63回応用物理学会春季学術講演会,
第63回応用物理学会春季学術講演会,
Mar. 2016.
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