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Publication List - Minami Teranishi 2017 (7 / 21 entries)
Journal Paper
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY,
Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
IEEE Conference Publications,
pp. 2187 - 2190,
Aug. 2017.
International Conference (Reviewed)
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Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End,
43rd International Conference on Micro & Nano Engineering (MNE2017),
MNE2017,
Sept. 2017.
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology,
The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017),
pp. 2187-2190,
June 2017.
Official location
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices,
21th International Conference on Solid State Ionics,
June 2017.
Domestic Conference (Reviewed)
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
積層メタルMEMS慣性センサの長期振動特性評価,
第9回集積化MEMSシンポジウム,
Oct. 2017.
Official location
Domestic Conference (Not reviewed / Unknown)
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Koichiro Tachibana,
Minami Teranishi,
Chun Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating,
The 78th JSAP Autumn Meeting, 2017,
Sept. 2017.
Official location
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Tso-Fu Mark Chang,
Toshifumi Konishi,
Teruaki Safu,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Tso-Fu Mark Chang,
Masato Sone,
Hiroshi Toshiyoshi,
Kazuya Masu,
Katsuyuki Machida.
積層メタル技術によるTi/Auめっき構造体のヤング率評価(1),
応用物理学会 2017年春季講演会,
応用物理学会 2017年春季講演会,
p. 14p-P3-14,
Mar. 2017.
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