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Publication List - Ken Atsumi 2020 (4 / 11 entries)
International Conference (Reviewed)
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Takashi Ichikawa,
Ken Atsumi,
Tatsuya Koga,
Daisuke Yamane,
Shin-ichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes,
Design, Test, Integration & Packaging of MEMS/MOEMS,
June 2020.
Domestic Conference (Not reviewed / Unknown)
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Takasi Itikawa,
Ken Atsumi,
Sayaka Koga,
Shinichi Iida,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu,
Hiroyuki Ito.
100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討,
第81回 応用物理学会秋季学術講演会,
Sept. 2020.
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Ken Atsumi,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討,
第67回応用物理学会春季学術講演会,
Mar. 2020.
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Takasi Itikawa,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討,
第67回応用物理学会春季学術講演会,
Mar. 2020.
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