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Publication List - Ken Atsumi 2019 (6 / 11 entries)
Journal Paper
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Ken Atsumi,
Shota Otobe,
Tatsuya Koga,
Takashi Ichikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers,
Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019),
IEEE Conference Paper,
IEEE,
May 2019.
Official location
International Conference (Reviewed)
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Daisuke Yamane,
Shota Otobe,
Ken Atsumi,
Tatsuya Koga,
Toshifumi Konishi,
Teruaki Safu,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS,
32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019),
pp. 684-687,
Jan. 2019.
Official location
Domestic Conference (Reviewed)
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Ken Atsumi,
Shouta Otobe,
Sayaka Koga,
Takasi Itikawa,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
積層メタル技術によるピラー型容量検出電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
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Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Au錘3軸MEMS加速度センサのためのSCD電極の検討,
第66回応用物理学会春季学術講演会,
Mar. 2019.
Domestic Conference (Not reviewed / Unknown)
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Takasi Itikawa,
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
3Dピラー型Au錘MEMS加速度センサ,
第36回「センサ・マイクロマシンと応用システム」シンポジウム,
19am3-PS3-21,
Nov. 2019.
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Takasi Itikawa,
Shouta Otobe,
Ken Atsumi,
Sayaka Koga,
Daisuke Yamane,
Shinichi Iida,
Hiroyuki Ito,
Noboru Ishihara,
Katsuyuki Machida,
Masato Sone,
Kazuya Masu.
Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2),
第80回応用物理学会秋季学術講演会,
Sept. 2019.
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