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田邊容由 2023年 研究業績一覧 (3件 / 14件)
論文
国際会議発表 (査読有り)
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Hiroyoshi Tanabe,
Akira Jinguji,
Atsushi Takahashi.
Accelerating EUV lithography simulation with weakly guiding approximation and STCC formula,
Proc. SPIE 12750, International Conference on Extreme Ultraviolet Lithography 2023, 127500D,
Society of Photo-Optical Instrumentation Engineers (SPIE),
Nov. 2023.
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Hiroyoshi Tanabe,
Akira Jinguji,
Atsushi Takahashi.
Evaluation of CNN for fast EUV lithography simulation using iN3 logic mask patterns,
Proc. SPIE 12495, Advanced Lithography + Patterning 2023, 124951J,
Apr. 2023.
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