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Publication List - Katsuyuki Machida (21 / 440 entries)
Journal Paper
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Kazuya Fujita,
Kosuke Suzuki,
Keisuke Asano,
Chun-Yi Chen,
Tomoyuki Kurioka,
Katsuyuki. Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone,
Tso-Fu Mark Chang.
Simultaneous Necking and Barreling Deformation Behaviors in Bending of Single Crystal Gold Micro-Cantilever,
Materials,
MDPI,
Vol. 17,
No. 16,
p. 4054,
Aug. 2024.
Official location
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Ryohei Hori,
Kazuya Fujita,
Chun Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section,
Micro and Nano Engineering,
Vol. 23,
p. 100259,
May 2024.
Official location
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Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun-Yi Chen,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone,
Tso-Fu Mark Chang.
Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component,
Micro and Nano Engineering,
Vol. 23,
p. 100254,
Apr. 2024.
Official location
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Ryosuke Miyai,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers,
Micro and Nano Engineering,
Vol. 23,
p. 100244,
Mar. 2024.
Official location
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Syunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers ,
Micro and Nano Engineering,
Vol. 29,
p. 100249,
Mar. 2024.
Official location
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Taro Omura,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki ; Ito,
Yoshihiro Miyake,
Masato Sone.
Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications,
Journal of The Electrochemical Society,
Vol. 171,
p. 032501,
Feb. 2024.
Official location
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Kisuke Miyado,
Devi Srujana Tenneti,
Akira Onishi,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology,
Japanese Journal of Applied Physics,
Vol. 63,
No. 4,
p. 04SP23,
Feb. 2024.
Official location
International Conference (Reviewed)
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Masato Sone,
Tso-Fu Mark Chang,
Tomoyuki Kurioka,
Chun-yi Chen,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake.
Material Property Control of Multi-layered Ti/Au Microcomponents by Electroplating Toward Ultra high-Sensitive MEMS Inertial Sensors,
2024 ICGET-Tw: The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan,
2024 ICGET-Tw,
Nov. 2024.
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Tomoyuki Kurioka,
Takumi Akiyama,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
Oct. 2024.
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Masato Sone,
Ryohei Hori,
Kazuya Fujita,
Kosuke Suzuki,
Ken Hashigata,
Keisuke Asano,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake.
Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Dold and Gold-Copper Alloys by Micro-\bending Test Toward MEMS Applications,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
Oct. 2024.
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Shunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Tenneti Devi Srujana,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
Oct. 2024.
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
CPIT2024, New Method of Damage and Failure Analysis of Structural Part,
Oct. 2024.
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Syunkai Watanabe,
Shunkai Watanabe,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Tenneti Devi Srujana,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Ryosuke Miyai,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Strain Rate Sensitivity in Gold Micro-Pillars: Designing MEMS Components with Grain Boundary and Sample Size Effects,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Kisuke Miyado,
Torauto Yamada,
Devi Srujana Tenneti,
Chihaya Mukaide,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
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Devi Srujana Tenneti,
Kisuke Miyado,
Chihaya Mukaide,
Torauto Yamada,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing,
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier),
Sept. 2024.
Domestic Conference (Reviewed)
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Syota Kanno,
Taro Omura,
Tomoyuki Kurioka,
Chun Yi Chen,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Tso-Fu Mark Chang,
Masato Sone.
Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications,
The 71st JSAP Spring Meeting 2024,
Proc. The 71st JSAP Spring MeetinProc.,
p. 23a-12K-3,
Mar. 2024.
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Chun Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass,
The 71st JSAP Spring Meeting 2024,
Proc. The 71st JSAP Spring MeetinProc.,
p. 23a-12K-2,
Mar. 2024.
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Ryosuke Miyai,
Tomoyuki Kurioka,
Chun Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures,
The 71st JSAP Spring Meeting 2024,
Proc. The 71st JSAP Spring MeetinProc.,
p. 23a-12K-1,
Mar. 2024.
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