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Publication List - Hiroyoshi Tanabe 2023 (3 / 14 entries)
Journal Paper
International Conference (Reviewed)
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Hiroyoshi Tanabe,
Akira Jinguji,
Atsushi Takahashi.
Accelerating EUV lithography simulation with weakly guiding approximation and STCC formula,
Proc. SPIE 12750, International Conference on Extreme Ultraviolet Lithography 2023, 127500D,
Society of Photo-Optical Instrumentation Engineers (SPIE),
Nov. 2023.
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Hiroyoshi Tanabe,
Akira Jinguji,
Atsushi Takahashi.
Evaluation of CNN for fast EUV lithography simulation using iN3 logic mask patterns,
Proc. SPIE 12495, Advanced Lithography + Patterning 2023, 124951J,
Apr. 2023.
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