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森達彦 研究業績一覧 (1件 / 4件)
国際会議発表 (査読有り)
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Shunkai Watanabe,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers,
MNE2025 Southampton,
MNE2025 Southampton,
Sept. 2025.
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