論文

• Kohei Shibata, Akihiro Uchiyama, Akira Onishi, Katsuyuki Machida, Parthojit Chakraborty, Shin-ichi Iida, Toshifumi Konishi, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure, IEEE Sensors Journal, Vol. 22, Issue 15, June 2022.  公式リンク  
  
• Akira Onishi, Kohei Shibata, Akihiro Uchiyama, Katsuyuki Machida, Taiki Ogata, Noboru Ishihara, Hirotaka Uchitomi, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement, Japanese Journal of Applied Physics, Vol. 61, p. SD1028, Mar. 2022.  公式リンク  
  

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