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清水哲也 2012年 研究業績一覧 (4件 / 25件)
論文
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曽根正人,
清水哲也,
Tso-Fu Mark Chang.
超臨界ナノプレーティング法の開発と超微細配線への応用,
精密工学会誌,
精密工学会,
Vol. 78,
No. 12,
pp. 1030-1033,
Dec. 2012.
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Nao Shinoda,
Tetsuya Shimizu,
Tso-Fu Mark Chang,
Akinobu Shibata,
Masato Sone.
Filling of nanoscale holes with high aspect ratio by Cu electroplating using suspension of supercritical carbon dioxide in electrolyte with Cu particles,
Microelectronic Engineering,
Elsevier,
Vol. 97C,
pp. 126-129,
Aug. 2012.
国際会議発表 (査読有り)
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Masato Sone,
Tetsuya Shimizu,
Nao Shinoda,
Tso-Fu Mark Chang.
Application of Electrodeposition using Supercritical Carbon Dioxide Emulsion into Integrated Circuit Technology (Invited Lecture),
TSCFA2012,
pp. in press,
Oct. 2012.
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Tetsuya Shimizu,
Yuma Ishimoto,
Tso-Fu Mark Chang,
Tatsuo Sato,
Masato Sone.
Continuous flow reaction system for nanoscale wiring by Cu electroplating using suspension of supercritical CO2 in electrolyte with Cu particles,
38th International Conference on Micro and Nano Engineering, (MNE2012),
38th International Conference on Micro and Nano Engineering, (MNE2012),
pp. P086-027,
Sept. 2012.
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