論文

• Tetsuya Shimizu, Nao Shinoda, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone. Crystal growth on novel Cu electroplating using suspension of supercritical CO2 in electrolyte with Cu particles, Surface & Coating Technology, Elsevier, Vol. 231, pp. 77-80, Aug. 2013.
• Nao Shinoda, Tetsuya Shimizu, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone. Cu electroplating using suspension of supercritical carbon dioxide in copper-sulfate-based electrolyte with Cu particles, Thin Solid Films, Elsevier, Vol. 529, pp. 29-33, Jan. 2013.
• Tso-Fu Mark Chang, Tetsuya Shimizu, Chiemi Ishiyama, Masato Sone. Effects of Pressure on Electroplating of Copper using Supercritical Carbon Dioxide Emulsified Electrolyte, Thin Solid Films, Elsevier, Vol. 529, pp. 25-28, Jan. 2013.

国際会議発表 (査読有り)

• Masato Sone, Tetsuya Shimizu, Tso-Fu Mark Chang, Yuma Ishimoto, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato. Nanoscale Wiring By Cu Electrodeposition in Supercritical Carbon Dioxide (Invited Lecture), 224th ECS Meeting, ECS, Nov. 2013.
• Yuma Ishimoto, Tetsuya Shimizu, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone. Cu Wiring by Electrodeposition in supercritical CO2 Emulsified Electrolyte using Continuous flow reaction system, TACT2013, International Thin Films Conference, TACT2013, Oct. 2013.

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