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Publication List - YUKI ONISHI 2008 (7 / 268 entries)
Journal Paper
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H. Takagi,
M.Takahashi,
R.Maeda,
Y.Onishi,
Y.Iriye,
T.Iwasaki,
Y.Hirai.
Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process,
Microelectronic Engineering,
Vol. 85,
No. 5,
pp. 902-906,
May 2008.
Official location
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Y. Hirai,
Y. Onishi,
T. Tanabe,
M. Shibata,
T. Iwasaki,
Y. Iriye.
Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography,
Microelectronic Engineering,
Vol. 85,
No. 5,
pp. 842–845,
2008.
Official location
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H. Takagi,
M. Takahashi,
R. Maeda,
Y. Onishi,
Y. Iriye,
T. Iwasaki,
Y. Hirai.
Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process,
Journal of Vacuum Science and Technology B,
Vol. 26,
No. 6,
pp. 2399-2403,
2008.
Official location
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Y.Onishi,
Y.Hirai,
高木秀樹,
M.Takahashi,
T.Tanabe,
R.Maeda,
Y.Iriye.
Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint,
Japanese Journal of Applied Physics,
Vol. 47,
No. 6,
pp. 5145-5150,
2008.
Official location
Book
International Conference (Reviewed)
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H, Takagi,
Y. Onishi,
M. Takahashi,
R. Maeda,
Y. Iriye,
T. Iwasaki,
Y. Hirai.
Experimental And Numerical Analysis On Recovery Of Polymer Deformation After Demolding In Hot-Embossing Process,
52nd International Conference on Electron, Ion, and Photon BeamTechnology andNanofabrication (EIPBN),
2008.
Domestic Conference (Not reviewed / Unknown)
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