論文

• Shinya Kondo, Reijiro Shimura, Takashi Teranishi, Akira Kishimoto, Takanori Nagasaki, Hiroshi Funakubo, Tomoaki Yamada. Influence of orientation on electro-optic effect in epitaxial Y-doped HfO2 ferroelectric thin films, Jpn. J. Appl. Phys., Vol. 60, pp. SFFB13-1-5, Aug. 2021.
• Shinya Kondo, Reijiro Shimura, Takashi Teranishi, Akira Kishimoto, Takanori Nagasaki, Hiroshi Funakubo, Tomoaki Yamada. Linear electro-optic effect in CMOS-compatible ferroelectric HfO2-based epitaxial thin films, Jpn. J. Appl. Phys. RAPID COMMUNICATION, Vol. 60, pp. 070905, June 2021.
• Reijiro Shimura, Takanori Mimura, Akinori Tateyama, Takao Shimizu, Tomoaki Yamada, Hiroshi Funakubo. Preparation of 1 μm-thick Y-doped HfO2 ferroelectric films on (111)Pt/TiOx/SiO2/(001)Si substrates by a sputtering method and their ferroelectric and piezoelectric properties, Jpn. J. Appl. Phys., vol. 60, pp. 031009, Mar. 2021.

国際会議発表 (査読なし・不明)

• Shinya Kondo, Reijiro Shimura, Takashi Teranishi, Akira Kishimoto, Takanori Nagasaki, Hiroshi Funakubo, Tomoaki Yamada. Electro-optic properties in ferroelectric HfO2-based epitaxial thin films, MRM 2021 (Materials Research Meeting 2021), Dec. 2021.
• Funakubo, H., Shimura, R., Mimura, T., Tateyama, A., Nakamura, Y., Shimizu, T., Yamada, T., Tanaka, Y., Inoue, Y.. Low temperature preparation of thick Y-HfO2 ferroelectric films, E-MRS (2021 Fall Meeting of the European Materials Research Society), Sept. 2021.
• Hiroshi Funakubo, Takanori Mimura, Reijiro Shimura, Yoshiko Nakamura, Takao Shimizu. Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films, 2021 Virtual MRS Spring Meeting & Exhibit, Apr. 2021.

国内会議発表 (査読なし・不明)

• 近藤真矢, 志村礼司郎, 寺西貴志, 岸本昭, 長崎正雅, 舟窪浩, 山田智明. Y添加HfO2強誘電体エピタキシャル薄膜の電気光学効果, 第82回応用物理学会秋季学術講演会, Sept. 2021.
• 高橋雄真, 白石貴久, 小寺正徳, 志村礼司郎, 三村和仙, 森分博紀, 田口綾子, 舟窪浩. HfO2基強誘電体膜のラマン分光測定, 第82回応用物理学会秋季学術講演会, Sept. 2021.
• 近藤真矢, 志村礼司郎, 舟窪浩, 寺西貴志, 岸本昭, 山田智明. エピタキシャルHfO2基強誘電体薄膜の電気光学特性, 第38回強誘電体会議（FMA 38）, June 2021.
• 海老原凌, 吉田慎哉, 志村礼司郎, 舟窪浩, 田中秀治. Y2O3-HfO2強誘電体薄膜を搭載したMEMSユニモルフカンチレバーの作製と特性評価, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 志村礼司郎, 三村和仙, 舘山明紀, 清水荘雄, 白石貴久, 舟窪浩. スパッタリング法によるY-HZO強誘電体厚膜の室温製膜とその電気特性および圧電特性評価, 第68回応用物理学会春季学術講演会, Mar. 2021.

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