|
冨谷茂隆 研究業績一覧 (11件)
論文
-
Taiga Horiguchi,
Takuya Hamada,
Masaya Hamada,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Hitoshi Wakabayashi.
Positive Seebeck coefficient of niobium-doped MoS2 film deposited by sputtering and activated by sulfur vapor annealing,
Japanese Journal of Applied Physics,
Vol. 61,
075506,
July 2022.
-
Takuya Hamada,
Masaya Hamada,
Taiga Horiguchi,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Hitoshi Wakabayashi.
High Seebeck Coefficient in PVD-WS2 Film with Grain-Size Enlargement,
Japanese Journal of Applied Physics (JJAP),
Vol. 61,
Feb. 2022.
-
Takuya Hamada,
Masaya Hamada,
Satoshi Igarashi,
Taiga Horiguchi,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Hitoshi Wakabayashi.
WS2 Film by Sputtering and Sulfur-Vapor Annealing, and its pMISFET with TiN/HfO2 Top-Gate Stack, TiN Bottom Contact, and Ultra-Thin Body and Box,
Journal of the Electron Devices Society (J-EDS),
Vol. 9,
p. 1117,
Aug. 2021.
国際会議発表 (査読有り)
-
Ryo Ono,
Shinya Imai,
Takamasa Kawanago,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Hitoshi Wakabayashi.
Improvement of MoS2 Film Quality by Solid-Phase Crystallization from PVD Amorphous MoSx Film,
IEEE Electron Devices Technology and Manufacturing Conference (EDTM),
Mar. 2023.
公式リンク
-
Shinya Imai,
Ryo Ono,
Iriya Muneta,
Kuniyuki Kakushima,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Kazuo Tsutsui,
Hitoshi Wakabayashi.
Grain-Size Enlargement of MoS2 Film by Low-Rate Sputtering with Molybdenum Grid,
IEEE Electron Devices Technology and Manufacturing Conference (EDTM),
Mar. 2023.
公式リンク
-
Takuya Hamada,
Taiga Horiguchi,
Masaya Hamada,
Iriya Muneta,
Kuniyuki Kakushima,
Kazuo Tsutsui,
Tetsuya Tatsumi,
Shigetaka Tomiya,
Hitoshi Wakabayashi.
Grain Size Enlargement in 2D WS2 Film with Low-Power RF-Magnetron Sputtering,
Internatonal Conference on Solid State Devices and Materials,
Sept. 2021.
-
Shinya Imai,
Takuya Hamada,
Masaya Hamada,
Takanori Shirokura,
Shigetaka Tomiya,
Iriya Muneta,
Kuniyuki Kakushima,
Tetsuya Tatsumi,
Kazuo Tsutsui,
Hitoshi Wakabayashi.
Importance of MoS2-Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication,
International Conference of Solid State Devices and Materials (SSDM) 2020,
Sept. 2020.
国内会議発表 (査読なし・不明)
-
今井 慎也,
梶川 亮介,
川那子 高暢,
宗田 伊理也,
角嶋 邦之,
辰巳 哲也,
冨谷 茂隆,
筒井 一生,
若林 整.
スパッタMoS2膜に対するエッジ金属コンタクトの電流電圧特性,
第84回応用物理学会秋季学術講演会,
Sept. 2023.
-
今井 慎也,
小野 凌,
宗田 伊理也,
角嶋 邦之,
辰巳 哲也,
冨谷 茂隆,
筒井 一生,
若林 整.
MoS2膜質のスパッタ成膜レート依存性調査,
第83回応用物理学会秋季学術講演会,
Sept. 2022.
-
堀口 大河,
濱田 拓也,
辰巳 哲也,
冨谷 茂隆,
星井 拓也,
角嶋 邦之,
筒井 一生,
若林 整.
スパッタMoS2膜のSF6プラズマ処理によるシート抵抗低減,
第80回応用物理学会秋季学術講演会,
Sept. 2019.
-
濱田 拓也,
堀口 大河,
辰巳 哲也,
冨谷 茂隆,
濱田 昌也,
星井 拓也,
角嶋 邦之,
筒井 一生,
若林 整.
スパッタMoS2膜のCl2プラズマ処理によるシート抵抗低減,
第80回応用物理学会秋季学術講演会,
Sept. 2019.
[ BibTeX 形式で保存 ]
[ 論文・著書をCSV形式で保存
]
[ 特許をCSV形式で保存
]
|