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Publication List - Yasuhiro Takimoto (9 entries)
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Journal Paper
International Conference (Reviewed)
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B. Huang,
Y. Takimoto,
M. Watanabe,
E. Hotta.
Xe-based Gas Jet Type Z-pinch Discharge Produced Plasma (DPP) EUV Source for Lithography,
23rd International Microprocesses and Nanotechnology Conference,
12D-11-1,
Nov. 2010.
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Bin Huang,
Yasuhiro Takimoto,
Masato Watanabe,
Eiki Hotta.
Xe-based Z-pinch gas jet type DPP EUV source for lithography,
Joint Technical Meeting on Plasma Science and Pulsed Power Technology,
The Papaers of Joint Technical Meeting on Plasma Science and Pulsed Power Technology,
IEEJ,
PST-10-034, PPT-10-055,
Aug. 2010.
Domestic Conference (Reviewed)
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Bin Huang,
Bin Xie,
Fei Jiang,
Taku Tomizuka,
Yasuhiro Takimoto,
Masato Watanabe,
Feng Xiao,
Eiki Hotta.
Numerical study of the initial gas distribution on a gas jet plasma EUV source,
2011 Annual Conference of Fundamentals and Materials Society IEE Japan,
Proceedings of 2011 Annual Conference of Fundamentals and Materials Society IEE Japan,
IEE Japan,
CD,
Sept. 2011.
International Conference (Not reviewed / Unknown)
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Eiki Hotta,
Yusuke Sakai,
Zhu Qiushi,
Yuya Ishizuka,
Yasuhiro Takimoto,
Huang Bin,
Masato Watanabe.
R&D of EUV and SXR Light Sources at Tokyo Institute of Technology,
2010 Academic Symposium on Optoelectronics and Microelectronics Technology and the 10th Chinese-Russian Symposium on Laser Physics and Laser Technologies,
2010 Academic Symposium on Optoelectronics and Microelectronics Technology and the 10th Chinese-Russian Symposium on Laser Physics and Laser Technologies,
Harbin Institute of Technology,
CD,
July 2010.
Domestic Conference (Not reviewed / Unknown)
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Y. Takimoto,
Huang Bin,
O. Sakuchi,
M. Watanabe,
E. Hotta.
Study of a Gas Jet Type Z-pinch EUV Light Source,
Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology,
Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology,
NIFS,
NIFS-PROC-87,
pp. 1-5,
Apr. 2011.
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Yasuhiro Takimoto,
Huang Bin,
Masato Watanabe,
Eiki Hotta.
Study on gas-jet type DPP light source using co-axial nozzle electrodes,
Joint Technical Meeting on Plasma Science and Technology and Pulsed power Technology,
The papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed power Technology,
IEE Japan,
PST-10-79/PPT-10-99,
pp. 63-65,
Dec. 2010.
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Masato Watanabe,
Yusuke Sakai,
Zhu Qiushi,
Huang Bin,
Yuya Ishizuka,
yasushi takimoto,
Eiki Hotta.
Development of short wavelength light sources using discharge plasma in low pressure condition,
平成22年電気学会基礎・材料・共通部門大会,
平成22年電気学会基礎・材料・共通部門大会,
IEE Japan,
CD,
Sept. 2010.
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Bin Huang,
Yasuhiro Takimoto,
Masato watanabe,
Eiki Hotta.
Xe-based Z-pinch Discharge Produced Plasma (DPP) EUV Source for Lithograph,
Technical Meeting on Pulsed Power Technology,
The papers of Technical Meeting on Pulsed Power Technology,
IEE Japan,
PPT-10-23,
pp. 15-18,
Feb. 2010.
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