論文

• B.Huang, T.Tomizuka, B.Xie, Y.Sakai, Q.Zhu, I.Song, A.Okino, F.Xiao, M.Watanabe, E.Hotta. Simulation and mitigation of the magneto-Rayleigh-Taylor instabilities in Z-pinch gas discharge extreme ultraviolet plasma radiation sources, Physics of Plasmas, AIP Publishing LLC, Vol. 20, Nov. 2013.
• Y. Sakai, J. Rosenzweig, H. Kumai, Y. Nakanishi, Y. Ishizuka, S. Takahashi, T. Komatsu, Y. Xiao, H. Bin, Z. Qiushi, Y. Hayashi, I. Song, T. Kawamura, M. Watanabe, E. Hotta. Observation of emission process in hydrogen-like nitrogen Z-pinch discharge with time integrated soft X-ray spectrum pinhole image, Physics of Plasmas, American Institute of Physics, Vol. 20, Feb. 2013.  公式リンク  
  
• Yusuke Sakai, Shunsuke Takahashi, Takanori Komatsu, Inho Song, Masato Watanabe, Eiki Hotta. Highly efficient pulsed power supply system with a two-stage LC generator and a step-up transformer for fast capillary discharge soft x-ray laser at shorter wavelength, Review of Scientific Instruments, American Instiitute of Physics, Vol. 81, 013303, pp. 1-3, Jan. 2010.
• Yusuke Sakai, Takanori Komatsu, Yifan Xiao, INHO SONG, Gohta Niimi, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA. Soft X-ray Radiation from Nitrogen Z-pinch Plasma Produced by Capillary Discahrge, IEEJ Trans. FM, IEEJ, Vol. 127, No. 11, pp. 675-680, Nov. 2007.
• Smruti Mohanty, T.Sakamoto, Y.Kobayashi, INHO SONG, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KAZUHIKO HORIOKA, E.Hotta. Miniature hybrid plasma focus extreme ultraviolet source driven by 10 kA fast current pulse, Review of Scientific Instruments, Vol. 77, No. 043506, pp. 1-7, Apr. 2006.
• INHO SONG, Kazuhiro Iwata, Yusuke Homma, Smruti Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KOICHI YASUOKA, KAZUHIKO HORIOKA, Eiki Hotta. A comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera, Plasma Sources Science and Technology, Vol. 15, pp. 322-327, Apr. 2006.
• INHO SONG, Kazuhiro IWATA, Yusuke HOMMA, Smruti Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KOICHI YASUOKA, KAZUHIKO HORIOKA, Eiki HOTTA. Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different dI/dt Discharge Current Pulses, Jpn. J. Appl. Phys., Vol. 44, No. 12, pp. 8640-8645, Dec. 2005.
• INHO SONG, Smruti Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KAZUHIKO HORIOKA, HOTTA Eiki. Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography, J.Plasma Fusion Res., Vol. 81, No. 9, pp. 647-648, Sept. 2005.

国際会議発表 (査読有り)

• Yusuke Sakai, Takanori Komatsu, Yifan Xiao, INHO SONG, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA. Soft X-ray radiation from nitrogen filled capillary z-pinch plasma, International Symposium on Discharges and Electrical Insulation in Vacuum, Sept. 2006.
• Yusuke Sakai, Takanori Komatsu, Yifan Xiao, INHO SONG, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA. Soft X-ray radiation from nitrogen filled Z-pinch plasma produced by capillary discharge, The 33rd IEEE International Conference on Plasma Science, IEEE, p. 314, 3P30, June 2006.  公式リンク  
  
• Inho Song, Yasunori Kobayashi, Toshiro Sakamoto, Smruti R. Mohanty, Masato Watanabe, Akitoshi Okino, Tohru Kawamura, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta. Performance of a Gas Jet Type Z-Pinch EUV Light Source, International Conference on Miro- and Nano-Engineering, 31st International Conference on Micro- Nano-Engineering, pp. 3-b-05, Sept. 2005.
• INHO SONG, K.Iwata, Y.Homma, S.R.Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KOICHI YASUOKA, KAZUHIKO HORIOKA, EIKI HOTTA. Development of a gas jet type Z-pinch EUV light source for lithography, International Pulsed Power Conference 2005, IEEE, June 2005.

国内会議発表 (査読有り)

• Naoya Iizuka, Toshiro Sakamoto, Yasunori Kobayashi, Inho Song, Smruti R. Mohanty, Masato Watanabe, AKITOSHI OKINO, Eiki Hotta. Optimization of a gas jet-type Z-pinch discharge EUV light source, 平成18年度日本分光学会春季講演会・シンポジウム, 日本分光学会, May 2006.

国際会議発表 (査読なし・不明)

• E. Hotta, Y. Sakai, Y. Hayashi, G. Niimi, B. Huang, Q. Zhu, I. Song, M. Watanabe. Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma, Int. Conf. on Optical and Photonic Engineering (icOPEN2015), Proc. of SPIE, SPIE, Vol. 9524, pp. 9524U1 - 8, Aug. 2015.

国内会議発表 (査読なし・不明)

• 岸望, 飯塚直哉, 坂本敏郎, 宋仁皓, 小林靖典, S.R. Mohanty, 渡辺正人, 沖野晃俊, 堀田栄喜. 同軸二重ノズル型電極を用いたEUV光源の出力特性, 平成１８年電気学会基礎・材料・共通部門大会, 平成１８年電気学会基礎・材料・共通部門大会（CD-ROM), pp. 259, Aug. 2006.
• 渡邊正人, 宋仁皓, 小林靖典, 坂本敏郎, S.R.Mohanty, 沖野晃俊, 堀岡一彦, 堀田栄喜. 同軸ノズル型電極を用いた放電プラズマからのEUV発光特性, 応用物理学会秋季講演会, 第66回応用物理学会学術講演会講演予稿集, No. 2, pp. 582, Sept. 2005.
• 渡邊正人, 宋仁皓, 小林靖典, 坂本敏郎, S.R.Mohanty, 沖野晃俊, 堀岡一彦, 堀田栄喜. 同軸ノズル型電極を用いた放電プラズマからのEUV発光特性, 応用物理学会秋季講演会, 第66回応用物理学会学術講演会講演予稿集, No. 2, pp. 582, Sept. 2005.

学位論文

• Study on Z-pinch plasma light source for EUV lithography,  Thesis,  Doctor of Engineering,  Tokyo Institute of Technology,  2005/12/31, 

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