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Publication List - Minami Teranishi 2015 (7 / 21 entries)
International Conference (Reviewed)
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
SSDM2015, 2015 International Conference on Solid State Devises and Materials,
pp. 52-53,
Sept. 2015.
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Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
AMC2015, Advanced Metallization Conference,
AMC2015,
Sept. 2015.
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Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Kazuya Masu,
Masato Sone.
Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
MNE2015, The 41th International Conference on Micro and Nano Engineering,
pp. Wed-C-p81,
Sept. 2015.
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Daisuke Yamane,
Toshifumi Konishi,
Minami Teranishi,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Hiroshi Toshiyoshi,
Kazuya Masu,
Masato Sone,
Katsuyuki Machida.
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,
25th Advanced Metallization Conference Asian Session (ADMETAplus2015),
Sept. 2015.
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Minami Teranishi,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Masaki Yano,
Katsuyuki Machida,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu,
Tatsuo Sato,
Masato Sone.
Stability of Movable Structure Formed by Au Electroplating for MEMS Devices,
ICMAT2015 & IUMRS-ICA2015,,
ICMAT2015 & IUMRS-ICA2015,,
June 2015.
Domestic Conference (Not reviewed / Unknown)
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Minami Teranishi,
Tso-Fu Mark Chang,
Toshifumi Konishi,
Takaaki Matsushima,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Daisuke Yamane,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
電解金めっきで作製したMEMSデバイスにおける動作構造安定性,
応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ,
p. 7,
July 2015.
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Minami Teranishi,
Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Takaaki Matsushima,
Hiroyuki Ito,
Hiroshi Toshiyoshi,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
電解金めっきで作製した微小カンチレバーの形状安定性評価,
平成27年電気学会センサ・マイクロマシン部門総合研究会,
pp. 15-18,
July 2015.
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