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Publication List - Kazuya Masu 1998 (5 / 1030 entries)
Journal Paper
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H. Matsuhashi,
A. Gotoh,
C. H. Lee,
M. Yokoyama,
K. Masu,
K. Tsubouchi.
Self-Aligned 10-nm Barrier Formation Technology for Fully-Self-Aligned Metallization Metal -Oxide-Semiconductor Field-Effect-Transistor,
Jpn. J. Appl. Phys.,
Vol. 37,
No. 6A,
pp. 3264-3267,
1998.
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K. Tsubouchi,
K. Masu.
Al CVD Technology using DMAH for ULSI Multilevel Interconnection,
International Workshop on Development of Thin Film for Future ULSI's and Nano-Scale Process Integration,
pp. 34,
1998.
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S. Shimano,
K. Masu,
K. Tsubouchi.
Reliability of SET Circuits Based on Eb/No-BER Characteristics,
1998 International Symposium on Formation, Physics and Device Application of Quantum Dot Structures (QDS '98),
pp. 16,
1998.
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H. Matsuhashi,
C. H. Lee,
M. Yokoyama,
K. Masu,
K. Tsubouchi.
Superiority of DMAH to DMEAA for Al CVD,
Proceedings of Advanced Metallization and Interconnection systems for ULSI Applications in 1997,
pp. 205-210,
1998.
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M. Yokoyama,
R. Tajima,
H. Matsuhashi,
K. Masu,
K. Tsubouchi.
Reduction of Parasitic Resistances in Wide-Gate Fully Self-Aligned-Metallization MOSFET,
Proceedings of Advanced Metallization and Interconnect Systems for ULSI Applications in 1997,
pp. 185-190,
1998.
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