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Publication List - Atsushi Nezu (2 / 282 entries)
Domestic Conference (Reviewed)
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Kazuki Shimatani,
Tetsuji Kiyota,
Kenta Doi,
Yuya Yamashita,
Wataru Kikuchi,
Kenta Ishi,
Jun Enomoto,
Yuchen Ye,
Atsushi Nezu,
Hiroshi Akatsuka.
Spatial Distribution Diagnosis of Electron Temperature and Density in Inductively Coupled Nitrogen-Argon Plasma by Tomographic OES: Validation with High-Resolution Single-Channel Spectroscopy and Langmuir Probe Measurement,
The 43rd Symposium on Plasma Processing (SPP43),
Proceedings of 43rd Symposium on Plasma Processing (SPP-43),
JSAP Div. Plasma Electronics,
pp. 61-62,
Jan. 2026.
Official location
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Wentao He,
Tetsuji Kiyota,
Kenta Doi,
Yuya Yamashita,
Wataru Kikuchi,
Yuchen Ye,
Shuhei Watanabe,
Atushi Nezu,
Hiroshi Akatsuka.
Spatially Resolved Measurement of Oxygen ICP and CCP Using Optical Emission Spectroscopy with Tomographic Analysis,
The 43rd Symposium on Plasma Processing (SPP43),
Proceedings of 43rd Symposium on Plasma Processing (SPP-43),
JSAP Div. Plasma Electronics,
pp. 59-60,
Jan. 2026.
Official location
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